Method of manufacturing axis seals, axis seals, axis seal members and rotary machine using axis seals

ABSTRACT

In a method of manufacturing an axis seal in accordance with the present invention, first, a roll of rolled metal material is cut out to predetermined size of metal material plates. Next, metal material plates are etched from both sides so as to form a predetermined size. Subsequently, the thin metal plates are arranged so as to be in a ring shape, orienting to the same direction, and are welded to be fixed. Additionally, during these processes, heat treatment is performed by heating rolls of rolled metal materials or metal material plates or thin metal plates at a predetermined timing, thereby eliminating residual stress (strain).

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method of manufacturing axis seals which restrain a flow of fluid in a direction of the rotation axis of a rotary machine such as a gas turbine and the like, axis seals, axis seal members and rotary machines using the axis seals.

2. Description of the Prior Art

A gas turbine which leads high temperature and high pressure gas to a turbine and expands it so as to generate motive power by converting the thermal energy of gas to kinetic rotational energy has a sealing mechanism (an axis seal) mounted thereto between the stationary vanes and the rotation axis in order to reduce an amount of high temperature and high pressure gas leaking from the high pressure side to the low pressure side. Conventionally, non-contact types of labyrinth seals are widely used as the sealing mechanism.

In the labyrinth seals, the amount of leaking gas is large because the clearance space at the tip of a fin must be made large to some extent in order that the tip of the fin will not come into contact during shaft vibration in the transient period of rotation or during transient time of thermal deformation. Leaf seals are developed to take the place of labyrinth seals as mentioned above, aiming at reduction in the leaking amount.

FIG. 18 is a perspective view of an axis seal (referred as a “leaf seal” hereafter). The leaf seal 9A shown in FIG. 18 consists of a housing 92 which is arranged outside of a rotating axis 91 so as to surround the rotating axis 91; a low pressure side plate 93 which is mounted on the lower side of gas pressure of the housing 92; a high pressure side plate 94 which is mounted opposite to the low pressure side plate 93 and on the higher side of gas pressure; and thin metal plates 95.

The thin metal plates 95 are fitted and engaged into the housing 92 and laminated to the housing 92 in a ring shape. Additionally, the thin metal plates 95 separate the clearance space surrounding the rotation axis 91 into a high-pressure region and a low-pressure region by sealing the periphery of the rotation axis 91. Moreover, on both sides of the thin metal plates 95 are the high-pressure side plate 94 mounted in the high-pressure region and the low-pressure side plate 93 mounted in the low-pressure region, each of which is mounted as a guide plate in a pressure-acting direction.

The thin metal plates 95 are designed so as to have a predetermined rigidity, which is determined by the thickness of the plate, in a circumferential direction of the rotation axis 91. Additionally, the thin metal plates 95 are mounted to the housing 92 in a manner that an angle made with the circumferential surface of the rotation axis 91 is to be an acute angle against the rotation direction of the rotation axis 91. When the rotation axis 91 stops, the tips of the thin metal plates 95 are in contact with the rotation axis 91 by a predetermined preload. However, when the rotation axis 91 rotates, the thin metal plates 95 and the rotation axis 91 are not in contact with each other because the tips of the thin metal plates 95 are raised by an effect of dynamic pressure caused by rotation of the rotation axis 91.

FIG. 19A and FIG. 19B show the front view and the side view of the thin metal plate 95 respectively. The portion 95 d indicated with halftone dot meshing in FIG. 19B is a portion, which is to be eliminated by etching when the thin metal plate 95 is manufactured. When the thin metal plates 95 are laminated, the portions 95 d to be eliminated by etching become a clearance space between the thin metal plates 95. In other words, the end portions 951 on the periphery of the thin metal plates 95 are arranged to be in contact with each other, while the end portions 952 on the opposite side of the end portion 951 are arranged so as not to be in contact.

In an axis sealing mechanism and a gas turbine that are constructed as described above, since the thin metal plates 95 having a width in the axial direction of the rotation axis 91 are laminated in a multiple number of layers in the circumferential direction of the rotation axis 91, these thin metal plates 95 have soft flexibility for the rotation axis 91 in the circumferential direction, and an axis sealing mechanism having high rigidity is constructed in the axial direction.

By having the space between the thin metal plates 95 made by the portions 95 d where thin metal plates are eliminated, it is possible to arrange the thin metal plates 95 more closely and it is also possible to make the space between the tips of the thin metal plates 95 and the rotation axis 91 significantly small, compared with non-contact type of labyrinth seals and the like, whereby it is possible to reduce the amount of leaking gas to be approximately {fraction (1/3)} to {fraction (1/10)} of that of labyrinth seals.

The thin metal plate 95 is formed so as to obtain the predetermined shape by etching a steel plate, which is formed by rolling. At this time, only one side of the thin metal plate 95 is partially etched to be eliminated. However, in case of a thin plate of metal material (e.g. stainless, Inconel, Hastelloy and the like) of approximately 0.1 mm thickness manufactured by rolling, as shown in FIG. 19B, large residual stress (strain) occurs inside the metal material at the time of cold rolling.

When such a material having a large residual stress (strain) inside thereof as described above is thinned by etching only one side thereof in an above-mentioned manner, the distribution of residual stress (strain) becomes non-uniform, causing bending or warp.

For example, as shown in FIG. 20, when assumed tensile stresses are formed on both surfaces of a cold-rolled material and assumed compressive stresses are formed inside thereof, as a whole, the residual stresses on the surface and the residual stresses inside thereof will balance, maintaining the plane. However, as shown in FIG. 21, when a portion 950 of the surface on one side of the thin metal plate 95 is eliminated by etching, residual stresses remain in the central portion 95C and on the surface 95S, excluding the eliminated portion 950. Therefore, by having compressive stress acting on one side (in the central portion 95C) while having tensile stress acting on the other side (on the surface portion 95S), bending moments 9M occur, whereby the thin metal plate 95 warps in a direction toward the eliminated portion 950.

A multiple number of thin metal plates 95 are used for a leaf seal 9A. By having the thin metal plates 95 warped due to residual stress, the leaf seal 9A has portions containing non-uniform space generated here and there, and in these portions, a flow of gas occurs, whereby airtightness of seal is sometimes lost.

Additionally, since the thin metal plates 95 warp in a direction opposite to the rotating direction of the rotation axis and the like facing to the seal 9A, there arises a possibility of the thin metal plates' 95 contacting with a rotation axis and the like due to shaft vibration during initiation of rotation or during a transition period of rotation such as stopping and the like, or due to a transient thermal deformation.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a method of manufacturing an axis seal which seals by laminating a plurality number of thin metal plates into a shape of a ring and to provide a method of an manufacturing axis seal, in order to manufacture an axis seal which has a smaller amount of leaking gas, compared with an axis seal which uses conventional thin metal plates.

It is another object of the present invention to provide an axis seal, which can be assembled easily and can attempt to reduce the amount of leaking gas, in other words, to stabilize the characteristic of seal.

Furthermore, the present invention seeks to provide a rotary machine using an axis seal which has a stable characteristic of seal, thereby showing a stable performance thereof, and at the same time does not reduce mechanical efficiency thereof significantly without changing the axis seal for a long time.

In order to achieve the above-mentioned objects, according to the present invention, there is provided a method of manufacturing an axis seal formed by laminating axis seal members of thin films having flexibility so as to be in a shape of a ring; wherein, it is characterized by including a cutting process in which a roll of rolled metal material is cut into a predetermined size of a metal material plate; an etching process in which a multiple number of axis seal members of thin metal plates are produced by etching the only one side of the metal material plates that are cut off in the aforementioned cutting process, so as to thin them and provide them with a difference in level; a welding process in which the thin metal plates formed by etching in the aforesaid manner are arranged so as to be in a ring shape and to be oriented in the same direction, and are welded to the casing to be fixed; and the heat treatment process in which residual stresses are eliminated by heating the metal materials or the axis seal members.

In a preferred embodiment according to the present invention, there is provided an axis seal member constructing an axis seal which is manufactured by a method of manufacturing an axis seal including heat treatment processes inserted at an appropriate step between a plurality of processes and which seals a flow in an axial direction of the rotation axis; wherein, an axis seal member is characterized by being a flat plate having no strain or almost having no strain.

In a further preferred embodiment according to the present invention, there is provided an axis seal which is manufactured by a method of manufacturing an axis seal including heat treatment processes inserted at an appropriate step between a plurality number of processes and which seals a flow in an axial direction of the rotation axis; an axis seal which is characterized by:

-   -   wherein, the axis seal members are formed so as to have no         strain or to almost have no strain and are laminated in a ring         shape;     -   wherein the axis seal members are arranged so as to contact the         rotation axis when the rotation axis stops; and     -   wherein, the tips of the axis seal members slightly rise from         the rotation axis due to dynamic pressure caused by rotation         when the rotation axis rotates.

In a further preferred embodiment according to the present invention, there is provided a rotary machine having an axis seal which separates the space surrounding the rotation axis into the high pressure region and the low pressure region; a rotary machine using an axis seal which is characterized by:

-   -   wherein, the axis seal is configured in a manner that a multiple         number of axis seal members are laminated in a ring shape;     -   wherein, axis seal members are manufactured by a method of an         axis seal including heat treatment processes at an appropriate         step between a plurality number of manufacturing processes of an         axis seal; and     -   wherein, the axis seal members are flat plates having no strain         or almost having no strain.

DESCRIPTION OF THE DRAWINGS

FIG. 1A is a front view of a thin metal plate which is an axis seal member in accordance with an embodiment of the prevent invention, and FIG. 1B is a side view of the thin metal plate shown in FIG. 1A.

FIG. 2A is a side view of an axis seal in accordance with the embodiment of the present invention; FIG. 2B is a cross-sectional view of an axis seal; FIG. 2C is a side view of an axis seal which has housings and side plates removed; and FIG. 2D depicts an action of the axis seal when the axis is rotating.

FIG. 3 is a layout drawing of a gas turbine.

FIG. 4 depicts manufacturing processes of an axis seal.

FIG. 5A through FIG. 5D depict examples of heat treatment processes respectively.

FIG. 6 is a flow chart of a manufacturing process of an axis seal.

FIG. 7 is a flow chart of a manufacturing process of an axis seal.

FIG. 8 is a flow chart of a manufacturing process of an axis seal.

FIG. 9 is a flow chart of a manufacturing process of an axis seal.

FIG. 10 is a flow chart of a manufacturing process of an axis seal.

FIG. 11 is a flow chart of a manufacturing process of an axis seal.

FIG. 12 is a flow chart of a manufacturing process of an axis seal.

FIG. 13 is a flow chart of a manufacturing process of an axis seal.

FIG. 14 is a flow chart of a manufacturing process of an axis seal.

FIG. 15 is a flow chart of a manufacturing process of an axis seal.

FIG. 16 is a flow chart of a manufacturing process of an axis seal.

FIG. 17 is a flow chart of a manufacturing process of an axis seal.

FIG. 18 is a perspective drawing of an example of a conventional leaf seal.

FIG. 19A is a top view of a thin metal plate to be used for a leaf seal of a conventional example, and FIG. 19B is a side view of a leaf seal to be used for a leaf seal of a conventional example.

FIG. 20 depicts a state of stresses on a metal member which is cold rolled.

FIG. 21 depicts deformation when a portion of a metal member is cut out.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Referring now to the drawings, an embodiment of the present invention will be described hereinafter.

FIG. 1A is a front view and FIG. 1B is a side view of a thin metal plate of an axis seal member in accordance with the embodiment of the present invention. FIG. 2A is a side view of an axis seal (referred as a “leaf seal” hereinafter) in accordance with the embodiment of the present invention, wherein a portion is partially cut off. FIG. 2B is a cross-sectional drawing of a leaf seal in accordance with the embodiment of the present invention. FIG. 2C is a side view of a leaf seal shown in FIG. 2B when the housings and the side plates thereof are removed. FIG. 2D is a side view of a leaf seal in accordance with the embodiment of the present invention when it is in a state of working.

As shown in FIG. 1A and FIG. 1B, a thin metal plate 1 has an edge portion 11 on the upper side in the figure (on the side of the periphery thereof when it is formed as a leaf seal) formed so as to be laterally long. Also, as shown in FIG. 1B, a tip 12 of the thin metal plate 1 on the lower side in the figure is formed to be thinner than the remaining portions by having one side eliminated.

In addition, the thin metal plate 1 has a connecting portion 121 of the tip 12 to the edge portion 11 on the periphery formed to be of more slender than the remaining portions. After a plurality number of thin metal plates 1 are laminated and fixed by welding, a tip 211 of a side plate 21 which will be described hereinafter is fit to the slender portion 121.

In FIG. 1B, a portion 1 d indicated with halftone dot meshing is a portion to be eliminated by etching while manufacturing of the above-mentioned thin metal plate 1. When thin metal plates 1 are laminated, the portion 1 d to be eliminated by etching becomes a clearance space between the thin metal plates 1. In other words, the edge portions 11 on the periphery of the thin metal plates 1 are arranged so as to contact with each other, whereas the tips 12 on the opposite side are arranged so as not to be in contact.

The leaf seal A shown in FIG. 2A through FIG. 2D is equipped with a thin metal plate 1 in a letter “T” viewed from the top; housings 2 catching the edge portion 11 on the periphery of a multiple number of laminated thin metal plates 1 from both sides; side plates 21 arranged along the tip 12 in the lower part of the housings 2; and a connection member 22 connecting the housings 2 on the right and on the left.

As shown in FIG. 2B and FIG. 2C, after arranging the thin metal plates 1 in a ring shape along the curved surface, the thin metal plates 1 are fixed to each other by welding Wd of both sides 111 and 111 of the edge portions 11 on the upper side of the thin metal plates 1 (on the periphery side when the thin metal plates 1 are formed as a leaf seal). Then, the tips 211 of side plates 21 are arranged in a manner that the slender portions 121 of the tips 12 of the thin metal plates 1 fixed by welding are fit to the tips 211 of side plates 21. (See FIG. 2B.)

Thereafter, the housings 2 are installed so as to catch in the both sides 111 and 111 of the edge portions 11, when the lower edges 2 d of the housings 2 are pressing the tips 211 of the side plates 21 from the outside. Additionally, the housings 2 support the thin metal plates 1 by arranging the connection member 22 between the upper edge portions 2 u on both right and left sides and fixing them with a fixing method which does not give an adverse effect to an action of the leaf seal. Welding, bolting and the like, although not limited to, are among methods of fixing the housings 2, the side plates 21 and the connection member 22.

The thin metal plates 1 laminated in a multiple number of layers are arranged so as to have the edge portions 11 on the upper side thereof get contact with each other and are fixed. However, in the tips 12, a portion thereof, which is thinner than the remaining portion, acts as a clearance gap. A clearance gap 1G has a uniform size at any location. (See FIG. 2A and FIG. 2C.)

A thin metal plate 1 is designed so as to have a predetermined rigidity, which is determined by plate thickness t, in a circumferential direction of a rotation axis Sp. Also, thin metal plates 1 are installed to the housings 2 in a manner that the angle θ made with a phase of the rotation axis Sp in the rotation direction of the rotation axis Sp is an acute angle. When the rotation axis Sp stops, the tips 12 of the thin metal plates 1 are in contact with the rotation axis Sp due to a predetermined preload; whereas, when the rotation axis Sp rotates, the tips 12 of the thin metal plates 1 rise upward due to dynamic effect caused by rotation of the rotation axis Sp, thereby causing the thin metal plates 1 not to be in contact with the rotation axis Sp. (See FIG. 2D.) The seal leaf A divides a space surrounding the rotation axis Ap into a high-pressure region and a low-pressure region by sealing the periphery of the rotation axis Sp.

This leaf seal A makes the periphery side thereof to be fixed to the housings 2 be rigid in an axial direction of the rotation axis Sp by laminating the thin metal plates 1 of sealing members in an axial direction of the rotation axis Sp, thereby making it possible to maintain sealing performance under condition of higher differential pressure. Additionally, existence of the clearance gap 1G provides advantages that seal is not broken during rotation and that durability is high.

FIG. 3 shows a layout of a gas turbine which is a rotary machine using a leaf seal shown in FIG. 2A through FIG. 2D. A gas turbine Gt shown in FIG. 3 comprises a compressor 3 which takes in a multiple amount of air inside thereof and compresses it; a combustor 4 which mixes the air compressed by the compressor 3 with fuel and burns it; a turbine 5 which is rotated by combustion gas by introducing the combustion gas generated in the combustor 4 into the inside thereof and expanding it threin; and a rotation axis 6 which is fixed relatively to the turbine 5. The gas turbine Gt generally utilizes a part of power, which is obtained by the rotation axis, as a power of the compressor 3.

The turbine 5 converts the thermal energy of combustion gas into the kinetic rotational energy by blowing combustion gas to rotating blades 51 installed to the rotation axis 6 and generates the power. The turbine 5 is equipped with a plurality number of stationary vanes 52 that are mounted mounted to a casing 50 of the turbine 5 as well as with a plurality number of rotating blades 51 mounted to the rotation axis 6, and these rotating blades 51 and stationary vanes 52 are arranged alternately in an axial direction of the rotation axis 6. The rotating blades 51 rotate the rotation axis 6 by receiving pressure of the combustion gas flowing in an axial direction of the rotation axis 6, and the rotational energy supplied to the rotation axis 6 is taken out from the end of the axis and used. Between the stationary vanes 52 and the rotation axis 6 is installed a leaf seal A as an axis seal for a purpose of reducing the amount of combustion gas leaking from the high pressure side to the low pressure side.

Additionally, the compressor 3 is connected coaxially to the turbine 5 by the rotation axis 6 and compresses fresh air by utilizing rotation of the turbine 5 so as to supply compressed air to the combustor 4. The compressor 3 has a plurality number of rotating blades 31 mounted to the rotation axis 6 and a plurality number of stationary vanes 32 mounted to a casing 30 of the compressor 3 in the same manner as the turbine 5 and has the rotating blades 31 and the stationary vanes 32 arranged alternately in an axial direction of the rotation axis 6. Between the stationary vanes 32 and the rotation axis 6 is installed a leaf seal A for a purpose of reducing the amount of compressed air leaking from the high pressure side to the low pressure side.

Moreover, a bearing portion 33 in which the casing 30 of the compressor 3 supports the rotation axis 6 and a bearing portion 53 in which the casing 50 of the turbine 5 supports the rotation axis 6 have a leaf seal A installed thereon as an axis seal to prevent compressed air or combustion gas from leaking from the high pressure side to the low pressure side.

The axis seal and the gas turbine constructed as mentioned above, have thin metal plates 1 having a width thereof in an axial direction of the rotation axis Sp are laminated in a multiple number of layers in a circumferential direction of the rotation axis Sp, wherein the thin metal plates 1 have soft flexibility in a circumferential direction of the rotation axis Sp, whereas constituting an axis seal having high rigidity in an axial direction.

In the embodiment of the present invention mentioned above, an adoption of a leaf seal to a gas turbine is exemplified. However, a leaf seal is not limited to this adoption but can be adopted widely to what can convert an energy into a duty due to a relation between the rotation of an axis and the flow of a fluid, for example, to a steam turbine, a compressor and the like. A leaf seal can be used to restrain the flow of a fluid in an axial direction of a rotation axis as well.

In FIG. 4, (A) through (F) show processes of manufacturing a thin metal plate from a metal material plate.

As shown in FIG. 4, a plurality number of thin metal plates 1 are manufactured from metal material plates by etching. First, a roll of rolled metal material M1 is cut out into an optimum size to be subject to the following processing step so as to form a predetermined size of metal material plates M2. (See (A) and (B).) Outline portions 10 of thin metal plates 1 and tips 12 of the thin metal plates 1, which are to be a clearance gap 1 d when the leaf seal A is assembled, are eliminated by etching from a first surface of the metal material plates M2. (See (C) and (D).) Thereafter, by etching only the outline portions 10 of the thin metal plates 1 from the opposite side, thin metal plates 1 are cut out from the metal material plate M2. (See (D).) In etching of the thin metal plates 1, an etching amount (the thickness of a plate) is controlled by adjusting the etching time.

The thin metal plates 1 shown in FIG. 4(E) are laminated in a ring shape with the portions 1 d eliminated by etching, heading for the same direction, and have both sides of the upper edge portions 11 extending to right and left welded, thereby fixing the thin metal plates 1 to each other. The thin metal plates 1 which are laminated so as to orient to the same direction and welded have the upper edge portions 11 thereof fit and engaged into the housings 2 on both sides, and by fixing the both sides of the housings 2 mutually, the laminated thin metal plates 1 are fixed. (See (F).)

FIG. 5 shows a process of heat treatment in accordance with the embodiment of the present invention.

In a heat treatment method HT1 shown in FIG. 5A, a roll of rolled metal M1 is expanded by being transmitted at a predetermined speed and is heated with a heating equipment HS, thereby removing residual stress (strain). Since heating H1 with the heating equipment HS is included as a part of a process, wherein a roll of rolled metal M1 is expanded and cut out into metal material plates M2 and since a volume of the metal M1 is small whereby holding time is reduced to be short, it is possible to shorten the production process.

In a heat treatment method HT2 shown in FIG. 5B, residual stress (strain) is eliminated by laminating the metal material plates M2 so as to be subject to weighting with P1 (dead weight+weight) and heating H2. This method can use an existing ordinary electric furnace, achieving a low cost. In addition, since laminated thin plates provide relatively uniform temperature distribution during heat treatment and during post-heat-treatment cooling, deformation of the thin plates after heat treatment, especially deformation at the edge portions due to non-uniform cooling, is small, thereby obtaining a material of good quality, having good flatness.

In a heat treatment method HT3 shown in FIG. 5C, by etching the metal material plates M2 after a plurality number of thin metal plates 1 are manufactured and by laminating the thin metal plates 1 and heating H3 them while weighting with P2 (dead weight+weight), residual stress (strain) is eliminated. Since the thin metal plates 1 are small, there is an advantage that a heating equipment becomes smaller.

In a heat treatment method H4 shown in FIG. 5D, by heating H4 after the thin metal plates 1 are laminated and welded, residual stress is eliminated from the thin metal plates 1. This method provides easier handling because the thin metal plates 1 are welded. Moreover, welding makes it possible to get rid of accumulated residual stress at the same time.

A First Embodiment of a Manufacturing Method in Accordance with the Present Invention

FIG. 6 shows a flow chart of a manufacturing process of an axis seal in accordance with an embodiment of the present invention.

A leaf seal A manufactured by a manufacturing process shown in FIG. 6 is an axis seal which seals low temperature fluid, and although not limited to this leaf seal, a leaf seal A is formed of stainless steel.

First, a metal formed by cold rolling so as to obtain a predetermined thickness has residual stress (strain) accumulated inside thereof. Therefore, in order to eliminate the residual stress (strain), heat treatment (heating at 740° C. for 30 minutes and then cooling) is performed by transmitting a roll of rolled metal material M1 little by little. (See FIG. 5A.) (Step S11)

Subsequently, a roll of rolled metal material M1 is cut out into a predetermined size. (Step S12) From the cut-out metal material plate M2, thin metal plates 1 are manufactured by etching the outline portions 10 from both sides and by etching the tips 12 from one side. (Step S13) A plurality number of the thin metal plates 1 manufactured in Step S13 are laminated so as to orient to the same direction and to be in a ring shape and are fixed to each other by welding both right and left sides 111 and 111 of the upper edge portions 11. (Step S14) After fixing a plurality number of the thin metal plates 1 in laminated state, the upper edge portions are fixed with the housings 2, the side plates 21 and the connection member 22 (Step S15), thus manufacturing a leaf seal.

In manufacturing a leaf seal by using the above-mentioned method, since heat treatment is performed while a roll of rolled metal material M1 is being transmitted, heat treatment can be executed continually, thereby shortening the production process. Additionally, since the production process is shortened, it is possible to achieve low cost for that much.

A Second Embodiment of a Manufacturing Method in Accordance with the Present Invention

FIG. 7 shows a flow chart of a manufacturing process of an axis seal in accordance with an embodiment of the present invention.

A roll of rolled metal material M1 is cut out into predetermined size of metal material plates M2 to be suitable for processing. (Step S21) A plurality number of the metal material plates M2 that are cut out into a predetermined size in Step S21 are arranged so as to be piled up, when anti-seizure lubricant is applied to spaces between the metal material plates M2. (Step S22) Thereafter, the metal material plates M2 laminated in Step S22 are heated (at 680° C. for four hours), weighting, whereby residual stress (strain) is eliminated from the metal material plates M2. (See FIG. 5B.) (Step S23)

Subsequently, the thin metal plates 1 are manufactured by having the portions of the metal material plates M2 which correspond to the outline portions 10 of the thin metal plates 1 etched from both sides and by having portions corresponding to the tips 12 etched from one side. (Step S24) A plurality number of the thin metal plates 1 manufactured in Step S24 are laminated so as to orient to the same direction and to be in a ring shape and are fixed to each other by welding both right and left sides 111 and 111 of the upper edge portions 11. (Step S25) After fixing a plurality number of the thin metal plates 1 in laminated state, the upper edge portions thereof are fixed with the housings 2, the side plates 21 and the connection member 22 (Step S26), thus manufacturing a leaf seal.

Manufacturing in the above-mentioned manner makes it possible to use an existing ordinary electric furnace, achieving low cost. In addition, since the laminated thin plates provide a relatively uniform temperature distribution during heat treatment and during post-heat-treatment cooling, deformation of the thin plates after heat treatment, especially deformation at the edge portions due to non-uniform cooling, is small, thereby obtaining a metal material plates M2 of good quality having good flatness.

Since this method is subject to batch processing, it is effective in case of a relatively small number of treatment.

A Third Embodiment of a Manufacturing Method in Accordance with the Present Invention

FIG. 8 shows a flow chart of a manufacturing process of an axis seal in accordance with an embodiment of the present invention.

A roll of rolled metal material M1 is cut out into a predetermined size of metal material plates M2 to be suitable for processing. (Step S31) Thin metal plates 1 are manufactured by having the portions of the metal material plates M2 cut out in Step S31 that correspond to the outline portions 10 of the thin metal plates 1 etched from both sides and by having the portions corresponding to the tips 12 etched from one side. (Step S32) The thin metal plates 1 formed in Step S32 are laminated so as to orient to a predetermined direction. (Step S33) The thin metal plates 1 piled up in Step S33 are heated (at 680° C. for four hours), weighting, thereby eliminating residual stress (strain) from the thin metal plates. (See FIG. 5C.) (Step S34)

Thereafter, the thin metal plates are laminated in a ring shape and both right and left sides 111 and 111 of the upper edge portions 11 are welded. (Step S35) After fixing a plurality number of the thin metal plates 1 in laminated state, the upper edge portions thereof are fixed with the housings 2, the side plates 21 and the connection member 22 (Step S36), thus manufacturing a leaf seal A.

A Fourth Embodiment of a Manufacturing Method in Accordance with the Present Invention

FIG. 9 shows a flow chart of a manufacturing process of an axis seal in accordance with an embodiment of the present invention.

A roll of rolled metal material M1 is cut out into predetermined size of metal material plates M2 to be suitable for processing. (Step S41) Thin metal plates 1 are manufactured by having the portions of the metal material plates M2 cut out in Step S41 which correspond to the outline portions 10 of the thin metal plates 1 etched from both sides and by having the portions corresponding to the tips 12 etched from one side as mentioned above. (Step 42)

A plurality number of thin metal plates 1 are laminated, heading for the same direction, and are fixed to each other by welding both right and left edge portions 111 and 111 of the upper edge portions 11. (Step S43) After being fixed in Step S43, the thin metal plates 1 in lamination layers are heated (at 680° C. for four hours) so as to eliminate residual stress (strain) which is accumulated inside of the thin metal plates 1. (See FIG. 5D.) (Step S44) Thereafter, the upper edge portions are fixed with the housings 2, the side plates 21 and the connection member 22 (Step S45), thus manufacturing a leaf seal.

The above embodiments are methods of manufacturing axis seals to be used where fluid of relatively low temperature (up to approximately 400° C.) is handled. The above-mentioned four methods are examples of manufacturing methods of a leaf seal, but not limited to. Temperature and time of heat treatment are not limited to the above, but it is possible to adopt manufacturing methods widely that can release residual stress (strain) accumulated on a metal plate.

A Fifth Embodiment of a Manufacturing Method in Accordance with the Present Invention

Next FIG. 10 shows a flow chart of a manufacturing process of an axis seal in accordance with an embodiment of the present invention.

An axis seal A manufactured in a manufacturing process shown in FIG. 10 is an axis seal which seals fluid of relatively high temperature (for example, more than 400° C.), and although not limited to, an axis seal is to consist of Inconel material herein.

Rolls of rolled metal materials that are formed by cold rolling so as to have a predetermined thickness have residual stress (strain) accumulated inside thereof. In order to eliminate the residual stress (strain), solution heat treatment is performed by transmitting rolls of rolled metal materials M1 little by little. (See FIG. 5A.) (Step S51) Solution heat treatment is a treatment, wherein a metal is held at a predetermined temperature for a predetermined time and subsequently, by cooling the metal rapidly, alloy elements and deposits are solved into matrix. Temperature and time conditions at this time are 980° C. and 30 minutes herein, but not limited to. Subsequently, a roll of cold-rolled metal material M1 is cut out into a predetermined size so as to be easy for processing. (Step S52)

Next, it is checked if oxidation scales have occurred on the surface of the metal material plates M2. (Step S53) In case of presence of oxidation scales (in case of YES in Step S53), oxidation scales are removed by soaking the metal material plates into an acid or alkali liquid. (Step S54)

When oxidation scales are not observed (in case of NO in Step S53) or after oxidation scales are got rid of in Step S54, the portions corresponding to the outline portions of the thin metal plates 1 are etched from both sides and the portions corresponding to the tips 12 thereof are etched from one side as mentioned above, thereby manufacturing thin metal plates 1. (Step S55) A plurality number of the thin metal plates 1 manufactured in Step S55 are laminated so as to orient to the same direction and to be in a ring shape and are fixed to each other by welding both right and left sides 111 and 111 of the upper edge portions thereof. (Step S56) After a plurality number of thin metal plates 1 are fixed in laminated state by welding, the upper edge portions thereof are fixed with the housings 2, the side plates 21 and the connection member 22 (Step S57), thus manufacturing a leaf seal.

Additionally, as shown in FIG. 11, a treatment, as an ageing treatment (Step S511), may be included;

-   -   wherein, after solution heat treatment (Step S51), the roll of         rolled metal material M1 are held at 732° C. for eight hours;     -   wherein the temperature is decreased down to 621° C., at which         the thin metal plates are held for ten hours; and     -   wherein, the thin metal plates are cooled. By performing         solution heat treatment, it is possible or it is almost possible         to eliminate residual stress (strain). However, ageing treatment         makes it possible to eliminate residual stress (strain) and to         obtain strength at high temperature as well.

Furthermore, a method is exemplified that acid or alkali liquid is used for washing in order to get rid of oxidation scales, but not limited to, and mechanical grinding with a grinder, for example, can be used. Also, it is not limited to the above-mentioned means, but it is possible to adopt means widely that can eliminate oxidation scales so as not to let them remain on the surfaces which are subject to etching.

A Sixth Embodiment of a Manufacturing Method in Accordance with the Present Invention

FIG. 12 shows a flow chart of a manufacturing process of an axis seal in accordance with an embodiment of the present invention.

A roll of rolled metal material M1 is cut out into predetermined size of metal material plates M2. (Step S61) A plurality number of metal material plates M2 cut out into a predetermined size in Step S61 are arranged so as to be piled up each other, when anti-seizure lubricant is applied to the space between the metal material plates M2. (Step S62) Thereafter, by heating the metal material plates M2 laminated in Step S62 (at 982° C. for 30 minutes), solution heat treatment is supplied so as to eliminate residual stress (strain) from the metal material plates. (See FIG. 5B.) (Step S63)

Subsequently, it is checked if oxidation scales have occurred on the surfaces of metal materials. (Step S64) In case of occurrence of oxidation scales (in case of YES in Step S64), oxidation scales are got rid of by soaking the metal material plates M2 in acid or alkali liquid. (Step S65)

When oxidation scales are not observed (in case of NO in Step S64) or after oxidation scales are got rid of in Step S65, the portions of the cut-out metal material plates M2 which correspond to the outline portions 10 of the thin metal plates 1 are etched from both sides and the portions corresponding to the tips 12 are etched from one side as mentioned above, thereby manufacturing thin metal plates 1. (Step S66) A plurality number of thin metal plates 1 manufactured in Step S66 are laminated so as to orient to the same direction and to be in a ring shape and are fixed to each other by welding both right and left sides 111 and 111 of the upper edge portions 11 thereof. (Step S67) After fixing a plurality number of thin metal plates 1 in laminated state, the upper edge portions thereof are fixed with the housings 2, the side plates 21 and the connection member 22 (Step S68), thereby manufacturing a leaf seal.

As shown in FIG. 13, a treatment, as an ageing treatment (Step S631), may be included;

-   -   wherein, after solution heat treatment (Step S63), thin metal         plates are held at 732° C. for eight hours;     -   wherein, subsequently, the temperature is decreased down to be         621° C., at which the thin metal plates are held for ten hours;         and     -   wherein, the thin metal plates are cooled. By performing         solution heat treatment, it is possible or it is almost possible         to eliminate residual stress (strain). However, ageing treatment         makes it possible to eliminate residual stress (strain) and to         obtain strength at high temperature as well.

Furthermore, a method is exemplified that acid or alkali liquid is used for washing in order to get rid of oxidation scales, but not limited to, and mechanical grinding with a grinder, for example, may be used. Also, it is not limited to the above-mentioned means, but it is possible to adopt means widely that can eliminate oxidation scales so as not to let them remain on the surfaces which are subject to etching.

A Seventh Embodiment of a Manufacturing Method in Accordance with the Present Invention

FIG. 14 shows a flow chart of a manufacturing process of an axis seal in accordance with an embodiment of the present invention.

A roll of rolled metal material M1 is cut out into a predetermined size of metal material plates M2 to be suitable for processing. (Step S71) The portions corresponding to the outline portions of the thin metal plates 1 are etched from both sides and the portions corresponding to the tips 12 thereof are etched from one side, as mentioned above, thereby manufacturing thin metal plates 1. (Step S72) A plurality number of thin metal plates 1 manufactured in Step S72 are arranged so as to be piled up, when anti-seizure lubricant is applied to the space between the metal plates. Subsequently, the thin metal plates 1 laminated in Step S73 are heated (at 982° C. for 30 minutes) so as to be provided with solution heat treatment, thereby getting rid of residual stress (strain) from the metal plates. (See FIG. 5C.) (Step S74)

Thereafter, a plurality number of thin metal plates 1 which are manufactured in Step S72 and have residual stress (strain) eliminated in Step S74 are laminated so as to orient to the same direction and to be in a ring shape, and the thin metal plates 1 are fixed to each other by welding both right and left sides 111 and 111 of the upper edge portions 11 thereof. (Step S75) After fixing a plurality number of thin metal plates 1 in laminated state, the upper edge portions thereof are fixed with the casings 2, the side plates 21 and the connection member 22 (Step S76), thus manufacturing a leaf seal.

As shown in FIG. 15, a treatment, as an ageing treatment (Step S741), may be included;

-   -   wherein, after solution heat treatment (Step S74), thin metal         plates are held at 732° C. for eight hours;     -   wherein, subsequently, the temperature is decreased down to be         621° C., at which the thin metal plates are held for ten hours;         and     -   wherein, the thin metal plates are cooled. By performing         solution heat treatment, it is possible or it is almost possible         to eliminate residual stress (strain). However, ageing treatment         makes it possible to eliminate residual stress (strain) and to         obtain strength at high temperature as well.

Furthermore, a method is exemplified that acid or alkali liquid is used for washing in order to get rid of oxidation scales, but not limited to, and mechanical grinding with a grinder, for example, can be used. Also, it is not limited to the above-mentioned means, but it is possible to adopt means widely that can eliminate oxidation scales so as not to let them remain on the surfaces which are subject to etching.

An Eighth Embodiment of a Manufacturing Method in Accordance with the Present Invention

FIG. 16 shows a flow chart of a manufacturing process of an axis seal in accordance with an embodiment of the present invention.

A roll of rolled metal material M1 is cut out into predetermined size of metal material plates M2 to be suitable for processing. (Step S81) The cut-out metal material plates M2 have the portions corresponding to the outline portions 10 of the thin metal plates 1 etched from both sides and have the portions corresponding to the tips 12 etched from one side, mentioned above, thereby manufacturing the thin metal plates 1. (Step S82) A plurality number of thin metal plates 1 manufactured in Step S82 are laminated so as to orient to the same direction and to be in a ring shape, and the thin metal plates 1 are fixed to each other by welding both right and left sides 111 and 111 of the upper edge portions 11 thereof (Step S83) The thin metal plates 1 welded and fixed in Step S83 are heated (at 982° C. for 30 minutes) so as to be provided with solution heat treatment, thereby getting rid of residual stress (strain) from the metal plates. (See FIG. 5D.) (Step S84)

Thereafter, the thin metal plates 1, which are welded and fixed in a ring shape in Step S83 and have residual stress eliminated in Step S84, have the upper edge portions 11 thereof fixed with the housings 2, the side plates 21 and the connection member 22 (Step S85), thereby manufacturing a leaf seal.

As shown in FIG. 17, a treatment may be included;

-   -   wherein, after solution heat treatment (Step S84), thin metal         plates 1 are held at 732° C. for eight hours as an ageing         treatment (Step S841);     -   wherein, subsequently, the temperature is decreased down to be         621° C., at which the thin metal plates are held for ten hours;         and     -   wherein, the thin metal plates are cooled. By performing         solution heat treatment, it is possible or it is almost possible         to eliminate residual stress (strain). However, ageing treatment         makes it possible to eliminate residual stress (strain) and to         obtain strength at high temperature as well. Additionally, since         heat treatment is performed after welding, it is also possible         to get rid of residual stress caused by welding.

Furthermore, a method is exemplified that acid or alkali liquid is used for washing in order to get rid of oxidation scales, but not limited to, and it is possible to adopt means widely that can eliminate oxidation scales so as not to have them remain on the surfaces which are subject to etching.

Each embodiment in accordance with the present invention mentioned above exemplifies that metal material plates are formed by cold rolling method, but not limited to, and it is possible to widely adopt a method that can stretch and roll a metal material plate to be thin. 

1. A method of manufacturing an axis seal comprising the following processes including: a cutting process in which a roll of rolled metal material is cut out into predetermined size of metal material plates; an etching process, wherein axis seal members consisting of a plurality number of thin metal plates are manufactured, wherein the surface of metal material plates that are cut out in the said cutting process by etching so as to make a wall thickness thereof thin and to achieve a difference in level thereof; a welding process, wherein the said thin metal plates formed by the said etching are arranged in a ring shape so as to orient to a same direction and then are welded together with a casing so as to be fixed; and a heat treatment process, wherein the said roll of rolled metal material is or the said metal material plates or the said axis seal members are heated so as to eliminate residual stress.
 2. A method of manufacturing an axis seal as described in claim 1: wherein, in order to perform the said heat treatment process between the said cutting process and the said etching process, the said heat treatment process includes: an lubricant-application process, wherein anti-seizure lubricant is applied to surfaces of a plurality number of metal material plates that are cut out in the said cutting process; a laminating process, wherein a plurality number of metal material plates to which the said anti-seizure lubricant is applied are laminated; and a heating process, wherein the said laminated metal material plates are weighted and heated.
 3. A method of manufacturing an axis seal as described in claim 1, wherein, in order to perform the said heat treatment process between the said etching process and the said welding process, the said heat treatment process includes: an application process, wherein, anti-seizure lubricant is applied to spaces between a plurality number of thin metal plates formed by the said etching; and a heating process, wherein thin metal plates to which the said anti-seizure lubricant is applied are weighted and heated.
 4. A method of manufacturing an axis seal as described in claim 1, wherein, the said heat treatment process is annealing.
 5. A method of manufacturing an axis seal as described in claim 1, wherein, the said heat treatment process is a solution heat treatment.
 6. A method of manufacturing an axis seal as described in claim 5, wherein, when the said heat treatment process is performed before the said etching process, prior to initiation of the said etching process, a de-scaling treatment process is performed in order to eliminate oxidation scales that are formed on a surface of metal material plates in the relevant heat treatment process.
 7. A method of manufacturing an axis seal as described in claim 5, wherein, when the said heat treatment process is performed before the said etching process, prior to initiation of the said etching process, a grinding process in which a surface is polished is performed in order to eliminate oxidation scales that are formed on a surface of metal material plates in the said heat treatment process.
 8. A method of manufacturing an axis seal as described in claim 5, wherein, the said heat treatment process is to have an ageing treatment performed after the said solution treatment.
 9. A method of manufacturing an axis seal as described in claim 8, wherein, when the said heat treatment process is to be performed before the said etching process, prior to initiation of the said etching process, a de-scaling treatment process is performed in order to eliminate oxidation scales that are formed on a surface of metal material plates in the said heat treatment process.
 10. A method of manufacturing an axis seal as described in claim 8, wherein, when the said heat treatment is to be performed before the said etching process, prior to initiation of the said etching process, a grinding process in which a surface is polished in order to eliminate oxidation scales that are formed on a surface of a metal material plates in the said heat treatment process.
 11. A method of manufacturing an axis seal member comprising the following processes including: a cutting process in which a roll of rolled metal material is cut out into predetermined size of metal material plates; an etching process, wherein axis seal members consisting of a plurality number of thin metal plates are manufactured; wherein the surface of metal material plates that are cut out in the said cutting process by etching so as to make a wall thickness thereof thin and to achieve a difference in level thereof; and a heat treatment process, wherein the said roll of rolled metal material is or the said metal material plates or the said axis seal members are heated so as to eliminate residual stress; wherein, the said axis seal member is a thin metal plate that has no strain or approximately has no strain.
 12. A method of manufacturing an axis seal comprising the following processes including: a cutting process in which a roll of rolled metal material is cut out into predetermined size of metal material plates; an etching process, wherein axis seal members consisting of a plurality number of thin metal plates are manufactured; wherein the surface of metal material plates that are cut out in the said cutting process by etching so as to make a wall thickness thereof thin and to achieve a difference in level thereof; a welding and assembly process, wherein the said thin metal plates formed by the said etching are arranged so as to be in a ring shape, orienting to the same direction, and are welded with a casing to be fixed: and a heat treatment process, wherein the said roll of rolled metal material is or the said metal material plates or the said axis seal members are heated so as to eliminate residual stress; wherein, the said axis seal is to be installed to a rotation axis in a manner that when a rotation axis stops, tips of the said axis seal members are arranged so as to be in contact with the said rotation axis and that when the said rotation axis rotates, tips of the said axis seal members rise slightly from the said rotation axis due to dynamic pressure caused by rotation.
 13. A method of manufacturing a rotary machine comprising the following processes including: a cutting process in which a roll of rolled metal material is cut out into predetermined size of metal material plates; an etching process, wherein axis seal members consisting of a plurality number of thin metal plates are manufactured; wherein the surface of metal material plates that are cut out in the said cutting process by etching so as to make a wall thickness thereof thin and to achieve a difference in level thereof; a welding and assembly process, wherein the said thin metal plates formed by the said etching are arranged so as to be in a ring shape, orienting to the same direction, and are welded with a casing to be fixed: and a heat treatment process, wherein the said roll of rolled metal material is or the said metal material plates or the said axis seal members are heated so as to eliminate residual stress; wherein, the said rotary machine includes a rotation axis and the said axis seal and separates a space surrounding the said rotation axis into a high pressure region and a low pressure region by arranging the said axis seal so as to surround the said rotation axis.
 14. A an axis seal member manufactured by using a method of manufacturing an axis seal member comprising the following processes including: a cutting process in which a roll of rolled metal material is cut out into predetermined size of metal material plates; an etching process, wherein axis seal members consisting of a plurality number of thin metal plates are manufactured; wherein the surface of metal material plates that are cut out in the said cutting process by etching so as to make a wall thickness thereof thin and to achieve a difference in level thereof; and a heat treatment process, wherein the said roll of rolled metal material is or the said metal material plates or the said axis seal members are heated so as to eliminate residual stress; wherein, the said axis seal member is a thin metal plate that has no strain or approximately has no strain.
 15. An axis seal manufactured by using a method of manufacturing an axis seal comprising the following processes including: a cutting process in which a roll of rolled metal material is cut out into predetermined size of metal material plates; an etching process, wherein axis seal members consisting of a plurality number of thin metal plates are manufactured; wherein the surface of metal material plates that are cut out in the said cutting process by etching so as to make a wall thickness thereof thin and to achieve a difference in level thereof; a welding and assembly process, wherein the said thin metal plates formed by the said etching are arranged so as to be in a ring shape, orienting to the same direction, and are welded with a casing to be fixed: and a heat treatment process, wherein the said roll of rolled metal material is or the said metal material plates or the said axis seal members are heated so as to eliminate residual stress; wherein, the said axis seal is to be installed to a rotation axis in a manner that when a rotation axis stops, tips of the said axis seal members are arranged to be in contact with the said rotation axis and that when the said rotation axis rotates, tips of the said axis seal members rise slightly from the said rotation axis due to dynamic pressure caused by rotation.
 16. A rotary machine by using a method of an axis seal comprising the following processes including: a cutting process in which a roll of rolled metal material is cut out into predetermined size of metal material plates; an etching process, wherein axis seal members consisting of a plurality number of thin metal plates are manufactured; wherein the surface of metal material plates that are cut out in the said cutting process by etching so as to make a wall thickness thereof thin and to achieve a difference in level thereof; a welding and assembly process, wherein the said thin metal plates formed by the said etching are arranged so as to be in a ring shape, orienting to the same direction, and are welded with a casing to be fixed: and a heat treatment process, wherein the said roll of rolled metal material is or the said metal material plates or the said axis seal members are heated so as to eliminate residual stress; wherein, the said rotary machine includes a rotation axis and the said axis seal and separates a space surrounding the said rotation axis into a high pressure region and a low pressure region by arranging the said axis seal so as to surround the said rotation axis. 